6H-SiC纳米磨削亚表面损伤机理的分子动力学研究

耿瑞文, 杨志豇, 杨蔚华, 谢启明, 游津京, 李立军, 吴海华

Molecular Dynamics Simulation of Subsurface Damage of 6H-SiC Bulk Materials Induced by Grinding with Nano-sized Diamond Particles

GENG Ruiwen, YANG Zhijiang, YANG Weihua, XIE Qiming, YOU Jinjing, LI Lijun, WU Haihua

图2 6H-SiC工件纳米磨削后的表面形貌

Fig.2 Surface morphology after nano-grinding of 6H-SiC