微量氮掺杂<strong>Ta</strong>涂层的制备及其热冲击和摩擦磨损性能

微量氮掺杂Ta涂层的制备及其热冲击和摩擦磨损性能

牛云松, 朱圣龙, 温钢柱, 王殿荣, 黄进峰, 陈明辉, 陈强, 王福会

Preparation, Thermal Shock and Wear Properties of a N-doped Ta Coating

NIU Yunsong, ZHU Shenglong, WEN Gangzhu, WANG Dianrong, HUANG Jinfeng, CHEN Minghui, CHEN Qiang, WANG Fuhui

表1 纳米压痕曲线反映的Ta(Ar)和Ta(Ar+N₂)涂层以及304不锈钢基体的硬度和弹性模量

Table 1 Hardness and elastic modulus of the Ta(Ar) and Ta(Ar+N₂) coatings and the 304 stainless steel substrate (304SS) obtained from their nano-indentation curves

	Hardness / GPa	Modulus / GPa
Ta(Ar+N₂)	14.7	233.8
Ta(Ar)	6.3	219.7
304SS	4.0	230.8