微量氮掺杂Ta涂层的制备及其热冲击和摩擦磨损性能
牛云松, 朱圣龙, 温钢柱, 王殿荣, 黄进峰, 陈明辉, 陈强, 王福会

Preparation, Thermal Shock and Wear Properties of a N-doped Ta Coating
NIU Yunsong, ZHU Shenglong, WEN Gangzhu, WANG Dianrong, HUANG Jinfeng, CHEN Minghui, CHEN Qiang, WANG Fuhui
图1 两种沉积态钽涂层的形貌
Fig.1 Surface morphology of as-deposited (a) Ta(Ar) and (c) Ta(Ar+N2) coating, cross-sectional morphology of as-deposited (b) Ta(Ar) and (d) Ta(Ar+N2) coating