微量氮掺杂Ta涂层的制备及其热冲击和摩擦磨损性能 |
牛云松, 朱圣龙, 温钢柱, 王殿荣, 黄进峰, 陈明辉, 陈强, 王福会 |
Preparation, Thermal Shock and Wear Properties of a N-doped Ta Coating |
NIU Yunsong, ZHU Shenglong, WEN Gangzhu, WANG Dianrong, HUANG Jinfeng, CHEN Minghui, CHEN Qiang, WANG Fuhui |
图1 两种沉积态钽涂层的形貌 |
Fig.1 Surface morphology of as-deposited (a) Ta(Ar) and (c) Ta(Ar+N2) coating, cross-sectional morphology of as-deposited (b) Ta(Ar) and (d) Ta(Ar+N2) coating |
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