高温氦离子辐照对钨表面形貌的影响

崔运秋, 牛春杰, 吕建骅, 倪维元, 刘东平, 鲁娜

Effect of Helium Ions Irradiation at High Temperature on Surface Morphology of Tungsten

CUI Yunqiu, NIU Chunjie, LV Jianhua, NI Weiyuan, LIU Dongping, LU Na

表1 He离子辐照实验的主要参数

Table 1 Main parameters of the He ion irradiation experiments

No. RF power / kW Ion flux / m-2·s Ion energy / eV Ion fluence / m-2 Irradiation time / s Surface temperature / K Gas 1 30 1.3 × 1023 30 4.0 × 1024 31 2300 He 2 30 1.3 × 1023 30 1.0 × 1025 77 2300 He 3 30 1.3 × 1023 30 3.0 × 1025 231 2300 He 4 30 1.3 × 1023 30 5.0 × 1025 385 2300 He 5 30 1.3 × 1023 30 1.0 × 1026 770 2300 He 6 21.4 7.4 × 1022 80 1.0 × 1025 120 2300 He 7 21.4 7.4 × 1022 80 3.0 × 1025 376 2300 He 8 21.4 7.4 × 1022 80 5.0 × 1025 690 2300 He 9 21.4 7.4 × 1022 80 7.0 × 1025 952 2300 He 10 21.4 7.4 × 1022 80 1.0 × 1026 1360 2300 He 11 21.4 7.4 × 1022 80 2.0 × 1026 2719 2300 He 12 20 5.1 × 1022 80 1.0 × 1025 210 2100 He 13 20.6 5.8 × 1022 120 1.0 × 1025 180 2300 He 14 29 1.2 × 1023 80 1.0 × 1025 95 2400 He 15 29 1.2 × 1023 80 3.0 × 1025 250 2400 He 16 29 1.2 × 1023 80 5.0 × 1025 420 2400 He 17 29 1.2 × 1023 80 1.0 × 1026 720 2400 He 18 30 1.3 × 1023 30 1.0 × 1026 770 2300 H2 19 26 7.7 × 1022 80 1.0 × 1026 1278 2300 H2