高温氦离子辐照对钨表面形貌的影响

崔运秋, 牛春杰, 吕建骅, 倪维元, 刘东平, 鲁娜

Effect of Helium Ions Irradiation at High Temperature on Surface Morphology of Tungsten

CUI Yunqiu, NIU Chunjie, LV Jianhua, NI Weiyuan, LIU Dongping, LU Na

图1 射频ICP离子源系统示意图

Fig.1 Schematic of RF ICP ion source system