脉冲激光沉积技术生长铜材碳基保护膜
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陆益敏, 马丽芳, 王海, 奚琳, 徐曼曼, 杨春来
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Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate
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LU Yimin, MA Lifang, WANG Hai, XI Lin, XU Manman, YANG Chunlai
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表1 多层碳基复合膜的结构设计
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Table 1 Structure design of the multilayer carbon-based complex coatings
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| Structure I | Material | Cu substrate/Ti/SiC/DLC | Thickness / μm Laserpulses (thousand) | 0.3/0.4/1.4 12/30/137 | | Structure II | Material | Cu substrate/Ti/(DLC/SiC)11/DLC | Thickness / μm Laser pulses (thousand) | 0.3/(0.12/0.03)11/0.12 12/(11.8/2.3)11/11.8 | | Structure III | Material | Cu substrate/Ti/SiC/(DLC/SiC)11/DLC | Thickness / μm Laser pulses (thousand) | 0.3/0.4/(0.12/0.03)11/0.12 12/30/(11.8/2.3)11/11.8 |
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