脉冲激光沉积技术生长铜材碳基保护膜

陆益敏, 马丽芳, 王海, 奚琳, 徐曼曼, 杨春来

Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate

LU Yimin, MA Lifang, WANG Hai, XI Lin, XU Manman, YANG Chunlai

图6 碳基复合膜结构III的纳米压痕测试结果

Fig.6 Load-depth (a) and hardness-depth curves (b) of carbon-based complex coating