脉冲激光沉积技术生长铜材碳基保护膜

陆益敏, 马丽芳, 王海, 奚琳, 徐曼曼, 杨春来

Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate

LU Yimin, MA Lifang, WANG Hai, XI Lin, XU Manman, YANG Chunlai

图5 碳基膜和碳基复合膜的拉曼光谱

Fig.5 Raman spectroscopies of single DLC layer (a), single SiC layer (b), and alternating DLC/SiC film (c)