脉冲激光沉积技术生长铜材碳基保护膜

陆益敏, 马丽芳, 王海, 奚琳, 徐曼曼, 杨春来

Carbon-base Protective Coating Grown by Pulsed Laser Deposition on Copper Substrate

LU Yimin, MA Lifang, WANG Hai, XI Lin, XU Manman, YANG Chunlai

图3 碳基复合膜结构II的剥离面及其XPS诊断结果

Fig.3 XPS survey (a) and Ti2p peak (b) of the exposed surface of carbon-based complex coating with structure II