磁控溅射TiAlTaN/TaO/WS复合涂层及其钛合金的切削性能
杜菲菲, 李超, 李显亮, 周尧尧, 阎庚旭, 李国建, 王强

Preparation of TiAlTaN/TaO/WS Composite Coatings by Magnetron Sputtering and their Cutting Properties on Titanium Alloy
DU Feifei, LI Chao, LI Xianliang, ZHOU Yaoyao, YAN Gengxu, LI Guojian, WANG Qiang
表1 TiAlTaN/TaO/WS低粘结与自润滑功能复合涂层的沉积参数
Table 1 Deposition parameters of the TiAlTaN low-affinity and self-lubricating functional composite coatings
LayerFunctionTarget

Power

/ W

Temperature

/ oC

Thickness

/ nm

Pressure

/ Pa

O2 pressure

/ Pa

TiBuffer layerTi700500
Gradient TiAlTaNHard layerTiAl7003500
Ta4503503503×10-30
TaOLow adhesive wear layerTa1001600.15
WSLow friction coefficient layerWS1251200