磁控溅射TiAlTaN/TaO/WS复合涂层及其钛合金的切削性能

杜菲菲, 李超, 李显亮, 周尧尧, 阎庚旭, 李国建, 王强

Preparation of TiAlTaN/TaO/WS Composite Coatings by Magnetron Sputtering and their Cutting Properties on Titanium Alloy

DU Feifei, LI Chao, LI Xianliang, ZHOU Yaoyao, YAN Gengxu, LI Guojian, WANG Qiang

图7 TiAlTaN/TaO复合涂层和TiAlTaN/TaO/WS复合涂层在25、50和100 g加载力下纳米压痕的SEM照片

Fig.7 Nano indentation SEM morphologies of the TiAlTaN/TaO composite coatings and the TiAlTaN/TaO/WS composite coatings under different loading forces (a, d) 25 g; (b, e) 50 g; (c, f) 100 g