磁控溅射TiAlTaN/TaO/WS复合涂层及其钛合金的切削性能

杜菲菲, 李超, 李显亮, 周尧尧, 阎庚旭, 李国建, 王强

Preparation of TiAlTaN/TaO/WS Composite Coatings by Magnetron Sputtering and their Cutting Properties on Titanium Alloy

DU Feifei, LI Chao, LI Xianliang, ZHOU Yaoyao, YAN Gengxu, LI Guojian, WANG Qiang

图5 TiAlTaN/TaO/WS复合涂层划痕的SEM形貌和局部放大、划痕声信号和划痕区域的成分分析

Fig.5 Overall scratch SEM morphology (a) and enlarged morphologies (b, c), scratch acoustic signal curves (d) and EDS results (e) of the TiAlTaN/TaO/WS composite coatings