磁控溅射TiAlTaN/TaO/WS复合涂层及其钛合金的切削性能

杜菲菲, 李超, 李显亮, 周尧尧, 阎庚旭, 李国建, 王强

Preparation of TiAlTaN/TaO/WS Composite Coatings by Magnetron Sputtering and their Cutting Properties on Titanium Alloy

DU Feifei, LI Chao, LI Xianliang, ZHOU Yaoyao, YAN Gengxu, LI Guojian, WANG Qiang

图3 TiAlTaN/TaO/WS复合涂层截面的SEM照片和相应的EDS面扫描图

Fig.3 SEM morphology and EDS mapping of the TiAlTaN/TaO/WS composite coatings (a) cross section morphology; (b) W element; (c) S element; (d) Ta element; (e) O element