单晶碳化硅接触中亚表层损伤与破坏机理的原子尺度分析
王胜, 周俏亭, 占慧敏, 陈晶晶

Atomic Analysis of Contact-induced Subsurface Damage Behavior of Single Crystal SiC Based on Molecular Simulation
WANG Sheng, ZHOU Qiaoting, ZHAN Huimin, CHEN Jingjing
图3 低温(5K)下单晶碳化硅纳米压痕接触中亚表层损伤的微结构演化特征
Fig.3 Microstructure evolution of single crystal SiC during nanoindentation contact at low temperature (5 K)