Cu掺杂非晶碳薄膜的电学性能及其载流子输运行为

闫春良, 郭鹏, 周靖远, 汪爱英

Electrical Properties and Carrier Transport Behavior of Cu Doped Amorphous Carbon Films

YAN Chunliang, GUO Peng, ZHOU Jingyuan, WANG Aiying

图8 Cu掺杂量为2.77%和7.28%样品的电子能量损失谱

Fig.8 EELS spectrum of a-C: Cu film with 2.77% and 7.28% Cu