Cu掺杂非晶碳薄膜的电学性能及其载流子输运行为

闫春良, 郭鹏, 周靖远, 汪爱英

Electrical Properties and Carrier Transport Behavior of Cu Doped Amorphous Carbon Films

YAN Chunliang, GUO Peng, ZHOU Jingyuan, WANG Aiying

图6 Cu掺杂量不同的a-C:Cu薄膜的XRD谱

Fig.6 XRD spectra of a-C:Cu films with different Cu contents