Cu掺杂非晶碳薄膜的电学性能及其载流子输运行为

闫春良, 郭鹏, 周靖远, 汪爱英

Electrical Properties and Carrier Transport Behavior of Cu Doped Amorphous Carbon Films

YAN Chunliang, GUO Peng, ZHOU Jingyuan, WANG Aiying

图4 Cu掺杂量不同的a-C: Cu薄膜的XPS全谱、各元素的含量、C 1s精细谱及各杂化碳含量、Cu 2p的精细谱以及Cu的俄歇谱

Fig.4 XPS spectra (a), the contents of C, O, Cu (b), C 1s spectra (c), sp2, sp3, and C-O/C=O contents (d), Cu 2p spectra (e) and Cu LMM Auger spectra (f) of a-C: Cu films with different Cu contents