Cu掺杂非晶碳薄膜的电学性能及其载流子输运行为

闫春良, 郭鹏, 周靖远, 汪爱英

Electrical Properties and Carrier Transport Behavior of Cu Doped Amorphous Carbon Films

YAN Chunliang, GUO Peng, ZHOU Jingyuan, WANG Aiying

图2 Cu掺杂非晶碳薄膜截面的SEM形貌

Fig.2 SEM cross-sectional morphology of a-C:Cu films (a) S1, (b) S2, (c) S3, (d) S4