偏压技术在金刚石薄膜制备中应用的进展

邵思武¹, 郑宇亭¹^,², 安康¹^,², 黄亚博¹, 陈良贤¹, 刘金龙¹, 魏俊俊¹, 李成明¹(

)

Progress on Application of Bias Technology for Preparation of Diamond Films

SHAO Siwu¹, ZHENG Yuting¹^,², AN Kang¹^,², HUANG Yabo¹, CHEN Liangxian¹, LIU Jinlong¹, WEI Junjun¹, LI Chengming¹(

)

图3. 不同能量离子的轰击效果和离子亚层注入诱导热尖峰^[34]

Fig.3. Schema of how subplanted ions increase local density (a) and thermal spike introduced by ion subplantation (b)^[34]