沉积时间对聚醚醚酮表面类金刚石薄膜的结构和性能的影响

崔丽, 孙丽丽, 郭鹏, 马鑫, 王舒远, 汪爱英

Effect of Deposition Time on Structure and Performance of Diamond-like Carbon Films on PEEK

CUI Li, SUN Lili, GUO Peng, MA Xin, WANG Shuyuan, WANG Aiying

图1 DLC薄膜沉积系统的示意图

Fig.1 Schematic diagram of the deposition system for DLC films