α籽晶促进低温反应溅射沉积α-Al2O3薄膜
Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering
α籽晶促进低温反应溅射沉积α-Al2O3薄膜 |
| 李修贤, 邱万奇, 焦东玲, 钟喜春, 刘仲武 |
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Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering |
| LI Xiuxian, QIU Wanqi, JIAO Dongling, ZHONG Xichun, LIU Zhongwu |
| 图5 在金箔基体表面α-Al2O3籽晶的分布 |
| Fig.5 Distribution of α-Al2O3 seeds pre-planting on surface of gold foil substrate |
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