α籽晶促进低温反应溅射沉积α-Al2O3薄膜
Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering
α籽晶促进低温反应溅射沉积α-Al2O3薄膜 |
| 李修贤, 邱万奇, 焦东玲, 钟喜春, 刘仲武 |
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Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering |
| LI Xiuxian, QIU Wanqi, JIAO Dongling, ZHONG Xichun, LIU Zhongwu |
| 图1 磁控溅射系统的结构 |
| Fig.1 Schematic of magnetron sputtering system |
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