Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响

张钧, 彭立静, 王宇, 王晓阳, 王楠, 王美涵

Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan

表1 (CrTiAl)N和(TiCr)N硬质膜的沉积工艺参数

Table 1 Deposition process parameters of (CrTiAl)N and (TiCr)N hard films

Film samples Cathodic arc current/A TiCr CrAl 1# 60 48 2# 55 50 3# 50 55 4# 48 60 0# 55\55 ~