Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响

张钧, 彭立静, 王宇, 王晓阳, 王楠, 王美涵

Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan

图4 (CrTiAl)N膜的XRD衍射谱和CrN、TiN的标准衍射谱

Fig.4 XRD patterns of (CrTiAl)N films and the standard diffraction patterns of CrN and TiN films