Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响
Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films
Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响 |
| 张钧, 彭立静, 王宇, 王晓阳, 王楠, 王美涵 |
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Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films |
| ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan |
| 图3 (CrTiAl)N膜的Al/Ti摩尔比以及对应的(归一化后)金属元素含量 |
| Fig.3 Al/Ti molar ratio and the corresponding metal content of (CrTiAl)N films (normalized) |
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