Al/Ti摩尔比对(CrTiAl)N硬质膜相结构和硬度的影响

张钧, 彭立静, 王宇, 王晓阳, 王楠, 王美涵

Effect of Al/Ti Molar Ratio on Phase Structure and Hardness of (CrTiAl)N Films

ZHANG Jun, PENG Lijing, WANG Yu, WANG Xiaoyang, WANG Nan, WANG Meihan

图2 (CrTiAl)N膜和(TiCr)N膜的表面和断面形貌

Fig.2 Surface and fracture section morphology of the as-deposited (CrTiAl)N and (TiCr)N films