磁场方向对碱腐蚀构建多晶硅绒面结构的影响

宋建宇, 李想, 王启安, 沈龙海, 齐东丽, 冯瑜, 陈建金

Effect of Magnetic Field Direction on Suede Structure of Alkaline Solution Corroded Polysilicon

SONG Jianyu, LI Xiang, WANG Qian, SHEN Longhai, QI Dongli, FENG Yu, CHEN Jianjin

图4 在不同强度磁场中处理多晶硅片的腐蚀程度

Fig.4 Corrosive degree of Polysilicon treated in different magnetic field