磁场方向对碱腐蚀构建多晶硅绒面结构的影响

宋建宇, 李想, 王启安, 沈龙海, 齐东丽, 冯瑜, 陈建金

Effect of Magnetic Field Direction on Suede Structure of Alkaline Solution Corroded Polysilicon

SONG Jianyu, LI Xiang, WANG Qian, SHEN Longhai, QI Dongli, FENG Yu, CHEN Jianjin

图1 在零磁场条件下处理的多晶硅片其形貌和表面三维高度

Fig.1 Morphology (a) and three-dimensional surface height (b) of Polysilicon treated in zero magnetic field