氧控In2O3薄膜的光电性能

孙茂林, 宫震, 王施文, 尹航, 李瑞武, 张政, 李雨彤, 吴法宇

Optical and Electrical Properties of Oxygen-controlled In2O3 Film

SUN Maolin, GONG Zhen, WANG Shiwen, YIN Hang, LI Ruiwu, ZHANG Zheng, LI Yutong, WU Fayu

图4 制备工艺不同的In2O3薄膜的电阻率、方块电阻、载流子浓度以及迁移率

Fig.4 Resistivity (a), sheet resistance (b), carrier concentration (c) and mobility (d) of In2O3 thin films under different processes