氧控In2O3薄膜的光电性能
Optical and Electrical Properties of Oxygen-controlled In2O3 Film
氧控In2O3薄膜的光电性能 |
| 孙茂林, 宫震, 王施文, 尹航, 李瑞武, 张政, 李雨彤, 吴法宇 |
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Optical and Electrical Properties of Oxygen-controlled In2O3 Film |
| SUN Maolin, GONG Zhen, WANG Shiwen, YIN Hang, LI Ruiwu, ZHANG Zheng, LI Yutong, WU Fayu |
| 图2 制备工艺不同的In2O3薄膜的XRD谱 |
| Fig.2 XRD pattern of In2O3 film under different processes |
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