FeCoNiMoCr高熵合金薄膜电极的电催化析氧性能
张泽灵, 王世琦, 徐邦利, 赵昱皓, 张旭海, 方峰

Electrocatalytic Oxygen Evolution Performance of High Entropy FeCoNiMoCr Alloy Thin Film Electrode
ZHANG Zeling, WANG Shiqi, XU Bangli, ZHAO Yuhao, ZHANG Xuhai, FANG Feng
表1 高熵薄膜电极的制备工艺参数
Table 1 Preparation parameters of high entropy thin film electrode

Base pressure

/Pa

Sputtering pressure

/Pa

Ar2 flow rate

/sccm

Sputtering power

/W

Deposition time

/h

6×10-40.530801