用<strong>RF-PECVD</strong>法制备类金刚石薄膜

用RF-PECVD法制备类金刚石薄膜

熊文文, 何嵩, 郑淞生, 程其进, 沈宏勋, 陈朝

Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD

XIONG Wenwen, HE Song, ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao

表1 拉曼峰的峰位和半峰宽

Table 1 Position and full width half maximum of the Raman peak

$V_{C H_{4}} / V_{A r}$	Top plate D bond /cm^-1		Top plate G bond /cm^-1		Bottom plate D bond /cm^-1		Bottom plate G bond /cm^-1
$V_{C H_{4}} / V_{A r}$	Position	FWHM	Position	FWHM	Position	FWHM	Position	FWHM
1:3	1462	153.89	1558	109.62	1365	45.78	1605	39.00
1:2	1461	155.21	1558	111.79	1332	78.83	1598	35.00
1:1	1465	153.39	1560	110.70	1334	86.28	1602	55.70
3:1	1469	153.88	1557	110.8	1332	104.79	1605	63.89
5:1	1462	154.66	1559	110.79	1342	84.32	1602	53.28
7:1	1457	153.79	1557	109.43	1339	23.09	1602	20.60
8:1	1468	153.70	1560	110.34	1355	14.28	1593	21.53