用RF-PECVD法制备类金刚石薄膜
熊文文, 何嵩(
), 郑淞生, 程其进, 沈宏勋, 陈朝()
), 郑淞生, 程其进, 沈宏勋, 陈朝()
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
XIONG Wenwen, HE Song(), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
图9.
Fig.9. SEM images of DLC film prepared on top (a) and bottom (b) plate when
