用RF-PECVD法制备类金刚石薄膜
熊文文, 何嵩(
), 郑淞生, 程其进, 沈宏勋, 陈朝()
), 郑淞生, 程其进, 沈宏勋, 陈朝()
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
XIONG Wenwen, HE Song(), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
图6. RF-PECVD腔室等离子体分布的示意图
Fig.6. Diagram of plasma distribution in RF-PECVD chamber
