用RF-PECVD法制备类金刚石薄膜
熊文文, 何嵩(
), 郑淞生, 程其进, 沈宏勋, 陈朝()
), 郑淞生, 程其进, 沈宏勋, 陈朝()
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
XIONG Wenwen, HE Song(), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
图5. 以CH4为碳源用RF-PECVD方法制备DLC薄膜的机理示意图
Fig.5. Image of the mechanism of preparing DLC film with CH4 as carbon source by RF-PECVD
