用<strong>RF-PECVD</strong>法制备类金刚石薄膜

用RF-PECVD法制备类金刚石薄膜

熊文文, 何嵩(

), 郑淞生, 程其进, 沈宏勋, 陈朝(

)

Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD

XIONG Wenwen, HE Song(

), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao(

)

图 3. $V C H 4 / V A r$ 对在上极板和下极板制备的DLC薄膜硬度的影响

Fig.3. Effect of $V C H 4 / V A r$ on hardness of DLC films prepared on top plate and bottom plate