用RF-PECVD法制备类金刚石薄膜
熊文文, 何嵩(
), 郑淞生, 程其进, 沈宏勋, 陈朝()
), 郑淞生, 程其进, 沈宏勋, 陈朝()
Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD
XIONG Wenwen, HE Song(), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
), ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao()
图1. RF-PECVD腔室结构的示意图
Fig.1. Schematic diagram of RF-PECVD chamber str-ucture
