Ti掺杂MoS2薄膜的抗氧化性和电学性能
谢明玲1, 张广安2, 史鑫1, 谭稀1, 高晓平1, 宋玉哲1(
)
)
Anti-oxidization and Electronic Properties of Ti Doped MoS2 Films
XIE Mingling1, ZHANG Guang'an2, SHI Xing1, TAN Xi1, GAO Xiaoping1, SONG Yuzhe1()
)
图1. 非平衡磁控溅射示意图
Fig.1. Schematic of unbalanced magnetron sputtering
