低能大流强氢离子辐照对钨的刻蚀行为
玄京凡, 范红玉(
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
Etching Behavior of Tungsten under Irradiation of Low Energy and High Flux Hydrogen Ions
XUAN Jingfan, FAN Hongyu(), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
图3. 200 eV的 H离子辐照后W表面的SEM照片和对应的EBSD图
Fig.3. irradiated at E=200 eV, and its corresponding EBSD mapping (a) low magnification SEM map, (b) EBSD map of (a), (c) local high magnification SEM map, and (d) EBSD map of (c)
