低能大流强氢离子辐照对钨的刻蚀行为
玄京凡, 范红玉(
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
Etching Behavior of Tungsten under Irradiation of Low Energy and High Flux Hydrogen Ions
XUAN Jingfan, FAN Hongyu(), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
图2. 不同H离子能量辐照下W表面的SEM照片
Fig.2. SEM images of W specimens irradiated at different H ion energy (a) 0 eV, (b) 5 eV, (c) 20 eV, (d) 40 eV, (e) 60 eV, (f) 100 eV, (g) 150 eV and (h) 200 eV
