低能大流强氢离子辐照对钨的刻蚀行为
玄京凡, 范红玉(
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
), 白樱, 胡瑞航, 李昕洋, 陶文辰, 倪维元(), 牛金海
Etching Behavior of Tungsten under Irradiation of Low Energy and High Flux Hydrogen Ions
XUAN Jingfan, FAN Hongyu(), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
), BAI Ying, HU Ruihang, LI Xinyang, TAO Wenchen, NI Weiyuan(), NIU Jinhai
图1. H等离子体发射光谱诊断
Fig.1. OES spectrum of H2 plasma
