基于分子动力学模拟的纳米多晶α-碳化硅变形机制
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图3. 压痕过程中基体的变形

Fig.3. Structural deformation during indentation (a)~(f) the distribution of IDS at h=1.0, 1.4, 1.8, 2.2, 2.6 and 3.0 nm