溅射沉积掺Ag的SnSe薄膜的微结构和热电性能

李贵鹏, 宋贵宏, 胡方, 杜昊, 尹荔松

Structure and Thermoelectric Properties of Ag-doped SnSe Thin Films Deposited by Magnetron Sputtering

LI Guipeng, SONG Guihong, HU Fang, DU Hao, YIN Lisong

表2 不同Ag含量沉积SnSe薄膜试样衍射峰峰的半高宽、衍射角及晶粒尺寸

Table 2 Half height width and diffraction angle of the diffraction peak and grain size of SnSe thin films with different Ag content

Sample(atomic fraction) FWHM/(°) β/(rad) 2θ/(°) D/nm 4.42% Ag 0.749 0.0131 37.678 11.15 7.97% Ag 0.585 0.0102 37.744 14.21 12.46% Ag 0.566 0.0098 37.744 14.79 15.55% Ag 0.601 0.0104 37.702 13.81