溅射沉积掺<strong>Ag</strong>的<strong>SnSe</strong>薄膜的微结构和热电性能

溅射沉积掺Ag的SnSe薄膜的微结构和热电性能

李贵鹏, 宋贵宏, 胡方, 杜昊, 尹荔松

Structure and Thermoelectric Properties of Ag-doped SnSe Thin Films Deposited by Magnetron Sputtering

LI Guipeng, SONG Guihong, HU Fang, DU Hao, YIN Lisong

表1 不同Ag掺杂量SnSe薄膜的成分

Table 1 Composition of SnSe film doped with different Ag content

The same size of Ag particles	Ag/%, atomic fraction	Sn/%, atomic fraction	Se/%, atomic fraction	Ag/(Sn+Se)	Sn/Se
0	0	56.46	43.54	0	1.297
2	4.42	54.82	40.76	0.035	1.345
4	7.97	53.12	38.91	0.087	1.365
6	12.46	50.67	36.87	0.142	1.374
8	15.55	49.63	34.82	0.184	1.425