溅射沉积掺Ag的SnSe薄膜的微结构和热电性能
李贵鹏1, 宋贵宏1(
), 胡方1, 杜昊2, 尹荔松3
), 胡方1, 杜昊2, 尹荔松3
Structure and Thermoelectric Properties of Ag-doped SnSe Thin Films Deposited by Magnetron Sputtering
LI Guipeng1, SONG Guihong1(), HU Fang1, DU Hao2, YIN Lisong3
), HU Fang1, DU Hao2, YIN Lisong3
图2. 不同Ag含量SnSe薄膜的表面形貌
Fig.2. Surface morphologies of SnSe thin films deposited with different Ag contents (atomic fraction) (a) 0% Ag, (b) 4.42% Ag, (c) 7.97% Ag, (d) 12.46% Ag, (e) 15.55% Ag
