溅射沉积掺Ag的SnSe薄膜的微结构和热电性能
李贵鹏1, 宋贵宏1(
), 胡方1, 杜昊2, 尹荔松3
), 胡方1, 杜昊2, 尹荔松3
Structure and Thermoelectric Properties of Ag-doped SnSe Thin Films Deposited by Magnetron Sputtering
LI Guipeng1, SONG Guihong1(), HU Fang1, DU Hao2, YIN Lisong3
), HU Fang1, DU Hao2, YIN Lisong3
图1. 不同Ag含量(原子分数)SnSe薄膜的XRD谱、局部XRD谱和掺4.42%Ag样品的元素分布图
Fig.1. XRD patterns of SnSe thin films deposited with different Ag contents (atomic fraction) (a), local XRD patterns (b) and elemental distribution of 4.42% Ag sample (c)
