超薄四面体非晶碳膜的结构和性能
许世鹏, 王华, 陈维铅, 李玉宏, 李玉军, 汪爱英

Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
XU Shipeng, WANG Hua, CHEN Weiqian, LI Yuhong, LI Yujun, WANG Aiying
表2 椭偏仪和分光光度计结合表征超薄ta-C碳膜厚度与sp3含量
Table 2 Thickness and sp3 content of ultrathin ta-C carbon films by a combined ellipsometry and spectrophotometry approach

Wavelength

/nm

Glass carbon for sp2 and diamond for sp3
190~1700
Time/min46101520
Thickness/nm7.611.017.524.033.0
sp3/sp24.5361.2550.9460.3390.334
sp3/%81.93655.64548.60525.30025.047
MSE1.9151.2323.2541.0291.172