超薄四面体非晶碳膜的结构和性能
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许世鹏, 王华, 陈维铅, 李玉宏, 李玉军, 汪爱英
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Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
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XU Shipeng, WANG Hua, CHEN Weiqian, LI Yuhong, LI Yujun, WANG Aiying
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表1 XRR测量超薄ta-C碳膜膜厚、密度以及表面粗糙度
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Table 1 Thickness, density and surface roughness of ultrathin ta-C carbon films by XRR
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| Sample | Density /kg·m-3 | Thickness /nm | Roughness /nm |
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| A | Surf layer | 2205 | 2.007 | 0.569 | | Bulk layer | 3042 | 3.542 | 0.530 | | Interface layer | 2349 | 2.552 | 2.662 | | B | Surf layer | 2090 | 1.828 | 0.439 | | Bulk layer | 3070 | 6.547 | 0.656 | | Interface layer | 2322 | 2.397 | 2.928 | | C | Surf layer | 2025 | 2.232 | 0.363 | | Bulk layer | 2917 | 12.916 | 0.810 | | Interface layer | 2138 | 3.630 | 1.806 | | D | Surf layer | 1899 | 2.414 | 0.475 | | Bulk layer | 2869 | 18.474 | 0.374 | | Interface layer | 2211 | 5.137 | 1.219 | | E | Surf layer | 2070 | 2.641 | 0.416 | | Bulk layer | 2841 | 29.965 | 0.599 | | Interface layer | 2686 | 2.4000 | 0.904 |
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