超薄四面体非晶碳膜的结构和性能
许世鹏1,3, 王华1,3, 陈维铅1,3, 李玉宏1,3, 李玉军1(
), 汪爱英2()
), 汪爱英2()
Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
XU Shipeng1,3, WANG Hua1,3, CHEN Weiqian1,3, LI Yuhong1,3, LI Yujun1(), WANG Aiying2()
), WANG Aiying2()
图7. 薄膜的残余压应力与膜厚的关系
Fig.7. Residual compressive stress of ultrathin ta-C films as a function of thickness
