钴掺杂TiO2纳米管阵列薄膜的制备及其光催化还原性能
王世琦,霍文燚,徐正超,张旭海,周雪峰,方峰

Fabrication of Films of Co Doped TiO2 Nanotube Array and their Photocatalytic Reduction Performance
Shiqi WANG,Wenyi HUO,Zhengchao XU,Xuhai ZHANG,Xuefeng ZHOU,Feng FANG
表1 Ti-Co合金薄膜的制备工艺参数
Table1 Preparation parameters of Ti-Co alloy films

Base pressure

/Pa

Sputtering pressure

/Pa

N2 flow rate

/sccm

Sputtering power

/W

Deposition time

/h

8×10-40.5301001